Examine large samples – automated and clean room compatible

Analyze smallest MEMS sensors up to XXL wafer or even entire flat planel panel displays without destroying them. Thanks to the sample height of up to 254 mm and lateral space of up to 300 mm you examine the broadest range of samples with Axio Imager Vario. The column design offers high stability.

Take control of your wafer in the clean room. A motorized z-drive in addition with the hardware auto focus ensure the automatic setting of the optimum focus position.

Clean Room

The production of semiconductors and inspection of wafers you proceed in clean rooms. Clean rooms are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992). Use the clean room kit, containing a 7x nosepiece turret, particle protection and sneeze guard.